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Feedback Stage Product List

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Submicron Feedback Stage FS-3150X/XY

Submicron Feedback Stage FS-3150X/XY

A positioning stage with a built-in long-stroke encoder, featuring high resolution, high position reproducibility, and high position retention.

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to minimize detection errors. It features a self-developed linear encoder and a proprietary feedback control circuit, providing high resolution, excellent positioning repeatability, and position retention after positioning. The stroke is '150mm' with a resolution of either '50nm' or '100nm' (*1). Due to the long stroke, it can perform both sample movement and precise positioning with just this one unit. (*1) In combination with the feedback stage controller FC-411 or FC-111.

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5nm Feedback Stage FS-1020SPX/XY

5nm Feedback Stage FS-1020SPX/XY

Built-in encoder: A positioning stage with high resolution, positioning reproducibility, and position holding capability of 5nm resolution!

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to minimize detection errors. It has a resolution of "5nm" (*1) and a stroke of "20mm." Thanks to our in-house developed linear scale and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controller FC-611.

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10nm Feedback Stage FS-1020PX/XY

10nm Feedback Stage FS-1020PX/XY

A positioning stage with excellent position resolution, reproducibility, and retention due to feedback control with 10nm resolution.

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to reduce detection errors. It performs feedback control based on the encoder's position information, offering high resolution, high positional reproducibility, and high positional stability. When used in combination with the feedback stage controller FC-511, it operates with a resolution of 10nm over a stroke of 20mm.

  • Other FA equipment
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10nm Feedback Stage FS-1040PX/XY

10nm Feedback Stage FS-1040PX/XY

[Stroke 40mm] A positioning stage with high resolution of 10nm, excellent positioning repeatability, and high position holding capability!

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to minimize detection errors. Thanks to our in-house developed linear encoder and proprietary feedback control circuit, it excels in resolution, positioning repeatability, and position holding capability. When combined with the feedback stage controller FC-511, it can operate with a reading resolution of '10nm' over a '40mm' stroke.

  • Other FA equipment
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10nm Feedback Stage FS-1050PX/XY

10nm Feedback Stage FS-1050PX/XY

"Precision positioning device" with high resolution of 10nm, high positioning repeatability, and excellent position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a stroke of 50mm with a resolution of 10nm (*1). Thanks to our in-house developed linear scale and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controller FC-511.

  • Other FA equipment
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Vacuum-Compatible 1nm Feedback Stage FS-1040UPX(V)

Vacuum-Compatible 1nm Feedback Stage FS-1040UPX(V)

Stage with built-in linear encoder that can be used in a vacuum with 1nm resolution.

This is a vacuum-compatible feedback stage equipped with exhaust gas countermeasures. It can be directly introduced into a vacuum chamber. The operating range is 40mm, allowing positioning and movement with a single unit. It incorporates a self-developed linear scale, resulting in a slim and lightweight design, and offers high-precision repeat positioning performance through full closed-loop control, featuring characteristics comparable to those for atmospheric use.

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1nm Feedback Stage FS-1020UPX / XY

1nm Feedback Stage FS-1020UPX / XY

"Precision positioning device" maintains high resolution of 1nm while increasing movement speed!

It is equipped with an optical linear encoder, allowing positioning with a resolution of '1nm' against the reading value of the built-in scale. The stroke is '20mm' long, enabling both transport and precise positioning with a single unit. It is used in research fields that handle wavelengths on the nanometer order.

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1nm Feedback Stage FS-1040UPX / XY

1nm Feedback Stage FS-1040UPX / XY

"Precision positioning device" maintains its high resolution of 1nm while achieving faster movement speed!

This is a precision positioning stage that incorporates an optical linear encoder, enabling closed-loop control with a resolution of '1nm' for the readings from the built-in scale. It has a long stroke of '40mm', allowing for both movement and precise positioning with a single unit. When used in combination with the feedback stage controller 'FC-911', it can operate at a movement speed of 5mm/sec.

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1nm Feedback Stage FS-1050UPX / XY

1nm Feedback Stage FS-1050UPX / XY

"Precision positioning device" maintains its high resolution of 1nm while achieving faster movement speed!

This is a precision positioning stage that incorporates an optical linear encoder, allowing for closed-loop control with a resolution of '1nm' based on the reading values of the built-in scale. The stroke is '50mm', enabling both movement and precise positioning with a single unit. When used in combination with the feedback stage controller 'FC-911', it can operate at a movement speed of 5mm/sec.

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1nm Feedback Stage FS-1050SPX(MD)/XY

1nm Feedback Stage FS-1050SPX(MD)/XY

"Precision positioning device" with 1nm high resolution, high positioning reproducibility, and excellent position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage, which reduces detection errors. It has a stroke of 50mm with a resolution of 1nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. The high torque type is FS-1050SPX (MD) and the high-speed type is FS-1050UPX. (*1) In combination with the feedback stage controller FC-911.

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Submicron Feedback Stage FS-1020X/XY

Submicron Feedback Stage FS-1020X/XY

Built-in encoder high-resolution and long-stroke positioning stage

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to reduce detection errors. It has a stroke of 20mm with a resolution of either 50nm or 100nm (*1). Thanks to our in-house developed linear encoder and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controllers FC-111 or FC-411.

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Submicron Feedback Stage FS-1040X/XY

Submicron Feedback Stage FS-1040X/XY

Built-in encoder high-resolution positioning stage with high positioning repeatability and excellent position holding after positioning!

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to minimize detection errors. By reading the position with a self-developed encoder and performing feedback control, it excels in resolution, positioning repeatability, and position holding capability. When combined with the feedback stage controller FC-411, it operates with a resolution of '50nm'. When combined with the FC-111, it operates with a resolution of '100nm'. The stroke is '40mm'.

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Submicron Feedback Stage FS-1050X/XY

Submicron Feedback Stage FS-1050X/XY

"Precision positioning device" with high resolution, high positioning reproducibility, and excellent position retention after positioning!

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to reduce detection errors. It has a stroke of 50mm with a resolution of either 50nm or 100nm (*1). Thanks to our in-house developed linear encoder and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controllers FC-411 or FC-111.

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Submicron Feedback Stage FS-1100X/XY

Submicron Feedback Stage FS-1100X/XY

100mm stroke long-stroke and high-resolution positioning stage

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage, reducing detection errors. Since the position is detected by the encoder and feedback control is performed, it excels in resolution, position reproducibility, and position holding capability. When combined with the feedback stage controller FC-411, it operates with a resolution of '50nm', and when combined with FC-111, it operates with a resolution of '100nm', with a stroke range of '100mm'.

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Micro Rotation Feedback Stage FS-1120θ

Micro Rotation Feedback Stage FS-1120θ

"Precision positioning device" - A positioning stage for feedback micro-rotation of '0.00005°' or '0.0001°'!

This is a positioning stage for minute rotations with a stroke of '±4°' that incorporates an optical encoder. It allows for feedback control with a minimum step increment of '0.00005°' (*1) or '0.0001°' (*2). Thanks to our proprietary feedback control circuit, it features high resolution, excellent positioning repeatability, and position retention after positioning. (*1) Combination with feedback stage controller FC-401 (*2) Combination with feedback stage controller FC-101

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5nm Feedback Stage FS-1040SPX/XY

5nm Feedback Stage FS-1040SPX/XY

Precision positioning device with an integrated linear encoder, operating with a resolution of 5nm.

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a stroke of 40mm with a resolution of 5nm (*1). Due to the combination of our self-developed linear scale and our unique feedback control circuit, it performs full closed-loop control, ensuring high resolution, high positioning reproducibility, and position retention after positioning. (*1) In combination with the feedback stage controller FC-611.

  • Other FA equipment
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5nm Feedback Stage FS-1050SPX/XY

5nm Feedback Stage FS-1050SPX/XY

"Precision positioning device" with 5nm high resolution, high positioning reproducibility, and excellent position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a stroke of 50mm with a resolution of 5nm (*1). Thanks to our proprietary linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controller FC-611.

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10nm Feedback Stage FS-1100PX/XY

10nm Feedback Stage FS-1100PX/XY

Built-in encoder, 10nm resolution, high positioning repeatability, and excellent position retention after positioning stage!

An optical linear encoder is built into the center of the stage to reduce position detection errors, and by feeding back position information to the controller, it achieves high resolution, high positioning repeatability, and position holding capability after positioning. The stroke is '100mm' with a resolution of '10nm' (*1). Due to the long operating range, both movement and positioning can be performed with this single stage. (*1) In combination with the feedback stage controller FC-511.

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Vacuum-compatible 1nm feedback stage FS-1020UPX(V)

Vacuum-compatible 1nm feedback stage FS-1020UPX(V)

【Usable in a vacuum】High-performance positioning stage with 1nm high resolution, high reproducibility, and high retention.

This is a vacuum-compatible feedback stage equipped with outgassing measures. It can be used inside a vacuum chamber. Due to the built-in linear encoder, it has high-precision repeat positioning performance through closed-loop control.

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Vacuum-compatible 1nm feedback stage FS-1050UPX(V)

Vacuum-compatible 1nm feedback stage FS-1050UPX(V)

[Vacuum Compatible] High-performance positioning stage with 1nm high resolution, high reproducibility, and high retention.

This is a vacuum-compatible feedback stage equipped with outgassing measures. It can be directly introduced into a vacuum chamber. It features a built-in linear scale developed in-house, allowing for a slim and lightweight design, as well as high-precision repeat positioning performance through full closed-loop control, possessing characteristics equivalent to those for atmospheric use.

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How to Choose a Feedback Stage (Positioning)

How to Choose a Feedback Stage (Positioning)

Optical linear scale! A system for positioning with nanometer resolution.

Feedback refers to a system that monitors position information from a linear scale through closed-loop control to improve the reproducibility of positioning. The feedback stage system is composed of a linear scale, a stage, and a controller. The selection guide introduces methods for selecting stages based on three points: "operating type," "resolution," and "stroke," tailored to the customer's specifications. 【Features of the Feedback Stage Controller】 - Full closed-loop control - Built-in motor driver - Various error detection functions - Communication via RS-232C standard / GPIB For more details, please contact us or download the catalog.

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1nm Feedback Stage FS-1020SPX(MD)/XY

1nm Feedback Stage FS-1020SPX(MD)/XY

"Precision positioning device" with 1nm high resolution, high positioning reproducibility, and excellent position holding stability after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage, reducing detection errors. It has a stroke of 20mm with a resolution of 1nm (*1). Thanks to our self-developed linear scale and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. The high torque type is FS-1020SPX(MD) and the high-speed type is FS-1020UPX. (*1) In combination with the feedback stage controller FC-911.

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1nm Feedback Stage FS-1040SPX(MD)/XY

1nm Feedback Stage FS-1040SPX(MD)/XY

"Precision positioning device" with 1nm high resolution, high positioning reproducibility, and excellent position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a resolution of "1nm" and a stroke of "40mm." Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. The high torque type is FS-1040SPX(MD) and the high-speed type is FS-1040UPX. (*1) In combination with the feedback stage controller FC-911.

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Submicron Feedback Stage FS-3200X/XY

Submicron Feedback Stage FS-3200X/XY

"Precision positioning device" with high resolution, high positioning repeatability, and excellent position holding capability after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage, reducing detection errors. It has a stroke of 200mm with a resolution of either 50nm or 100nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. Equipped with a slowdown sensor, it minimizes the impact during stops at the stroke end. (*1) In combination with the feedback stage controllers FC-414 or FC-114.

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Vacuum-compatible submicron feedback stage, lift type

Vacuum-compatible submicron feedback stage, lift type

Usable in a vacuum! Positioning stage for the Z-axis with built-in linear encoder and sub-micron resolution!

This is a high-resolution Z-axis positioning stage equipped with an optical linear scale. It achieves a stroke of either 5mm or 10mm with a resolution of either 50nm (*1) or 100nm (*2). It has been treated for outgassing and can be used in a vacuum. Thanks to its unique design, it minimizes changes in the tilt of the table surface, which is common in Z-axis configurations, and is equipped with a self-developed linear scale and proprietary feedback control circuit, providing high resolution, excellent positioning repeatability, and position retention after positioning. (*1) Combination with feedback stage controller FC-411 (*2) Combination with feedback stage controller FC-111

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Vacuum-compatible 10nm feedback stage with 20mm operation.

Vacuum-compatible 10nm feedback stage with 20mm operation.

High-performance positioning stage with a built-in linear encoder operating at 10nm resolution, usable in a vacuum.

This is a vacuum-compatible feedback stage equipped with outgassing measures. It can be directly introduced into a vacuum chamber. It has a built-in optical linear encoder, and based on the position information detected by the encoder, it performs full closed-loop control, resulting in high-precision repeatability in positioning. It can achieve positioning with a 20mm stroke and a resolution of 10nm.

  • Other FA equipment
  • Other microscopes
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  • Feedback Stage

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Vacuum-compatible submicron feedback stage with 40mm operation.

Vacuum-compatible submicron feedback stage with 40mm operation.

High-resolution positioning stage with built-in encoder for use in a vacuum.

The built-in optical linear encoder detects the position of the stage and performs full closed-loop control, resulting in high resolution and excellent position reproducibility. Since it is driven by a stepping motor and ball screw, it has excellent position holding capability. Due to the use of components that are less likely to outgas in the vacuum chamber, the stage can be placed inside the vacuum chamber. It can operate within a range of 40mm and can be controlled with a resolution of "50nm" or "100nm" (depending on the controller).

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Vacuum-compatible submicron feedback stage with 20mm operation

Vacuum-compatible submicron feedback stage with 20mm operation

Feedback stage with submicron resolution usable in a vacuum.

The built-in optical linear encoder detects the position of the stage table and feeds the position information back to the controller, resulting in high resolution and excellent position reproducibility. Since it is driven by a stepping motor and ball screw, it has excellent position retention. As a countermeasure against outgassing, lubricants, wires, and motors have been replaced with vacuum-compatible products, allowing for use within a vacuum chamber. It can operate within a range of 20mm and can be controlled with a resolution of "50nm" or "100nm" (depending on the controller).

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Vacuum-compatible submicron feedback stage, micro-rotation type

Vacuum-compatible submicron feedback stage, micro-rotation type

Usable in a vacuum! Stage for adjusting rotation direction

It is equipped with an optical linear encoder, allowing it to detect the position of the movable parts of the stage, which enables the controller to perform closed-loop control based on that position information, resulting in excellent position reproducibility. The resolution can be operated at "0.00005" or "0.0001" resolution, depending on the controller. It has been treated for outgassing, making it usable in a vacuum.

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10nm Feedback Stage FS-3150X/XY

10nm Feedback Stage FS-3150X/XY

"Precision positioning device" with high resolution, excellent positioning reproducibility, and strong position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a stroke of 150mm with a resolution of 10nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controller FC-511.

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