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Feedback Stage - List of Manufacturers, Suppliers, Companies and Products

Feedback Stage Product List

1～15 item / All 37 items

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Submicron Feedback Stage FS-3150X/XY

Submicron Feedback Stage FS-3150X/XY

A positioning stage with a built-in long-stroke encoder, featuring high resolution, high position reproducibility, and high position retention.

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to minimize detection errors. It features a self-developed linear encoder and a proprietary feedback control circuit, providing high resolution, excellent positioning repeatability, and position retention after positioning. The stroke is '150mm' with a resolution of either '50nm' or '100nm' (*1). Due to the long stroke, it can perform both sample movement and precise positioning with just this one unit. (*1) In combination with the feedback stage controller FC-411 or FC-111.

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5nm Feedback Stage FS-1020SPX/XY

5nm Feedback Stage FS-1020SPX/XY

Built-in encoder: A positioning stage with high resolution, positioning reproducibility, and position holding capability of 5nm resolution!

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to minimize detection errors. It has a resolution of "5nm" (*1) and a stroke of "20mm." Thanks to our in-house developed linear scale and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controller FC-611.

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10nm Feedback Stage FS-1020PX/XY

10nm Feedback Stage FS-1020PX/XY

A positioning stage with excellent position resolution, reproducibility, and retention due to feedback control with 10nm resolution.

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to reduce detection errors. It performs feedback control based on the encoder's position information, offering high resolution, high positional reproducibility, and high positional stability. When used in combination with the feedback stage controller FC-511, it operates with a resolution of 10nm over a stroke of 20mm.

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10nm Feedback Stage FS-1040PX/XY

10nm Feedback Stage FS-1040PX/XY

[Stroke 40mm] A positioning stage with high resolution of 10nm, excellent positioning repeatability, and high position holding capability!

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to minimize detection errors. Thanks to our in-house developed linear encoder and proprietary feedback control circuit, it excels in resolution, positioning repeatability, and position holding capability. When combined with the feedback stage controller FC-511, it can operate with a reading resolution of '10nm' over a '40mm' stroke.

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10nm Feedback Stage FS-1050PX/XY

10nm Feedback Stage FS-1050PX/XY

"Precision positioning device" with high resolution of 10nm, high positioning repeatability, and excellent position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage to reduce detection errors. It has a stroke of 50mm with a resolution of 10nm (*1). Thanks to our in-house developed linear scale and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controller FC-511.

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Vacuum-Compatible 1nm Feedback Stage FS-1040UPX(V)

Vacuum-Compatible 1nm Feedback Stage FS-1040UPX(V)

Stage with built-in linear encoder that can be used in a vacuum with 1nm resolution.

This is a vacuum-compatible feedback stage equipped with exhaust gas countermeasures. It can be directly introduced into a vacuum chamber. The operating range is 40mm, allowing positioning and movement with a single unit. It incorporates a self-developed linear scale, resulting in a slim and lightweight design, and offers high-precision repeat positioning performance through full closed-loop control, featuring characteristics comparable to those for atmospheric use.

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1nm Feedback Stage FS-1020UPX / XY

1nm Feedback Stage FS-1020UPX / XY

"Precision positioning device" maintains high resolution of 1nm while increasing movement speed!

It is equipped with an optical linear encoder, allowing positioning with a resolution of '1nm' against the reading value of the built-in scale. The stroke is '20mm' long, enabling both transport and precise positioning with a single unit. It is used in research fields that handle wavelengths on the nanometer order.

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1nm Feedback Stage FS-1040UPX / XY

1nm Feedback Stage FS-1040UPX / XY

"Precision positioning device" maintains its high resolution of 1nm while achieving faster movement speed!

This is a precision positioning stage that incorporates an optical linear encoder, enabling closed-loop control with a resolution of '1nm' for the readings from the built-in scale. It has a long stroke of '40mm', allowing for both movement and precise positioning with a single unit. When used in combination with the feedback stage controller 'FC-911', it can operate at a movement speed of 5mm/sec.

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1nm Feedback Stage FS-1050UPX / XY

1nm Feedback Stage FS-1050UPX / XY

"Precision positioning device" maintains its high resolution of 1nm while achieving faster movement speed!

This is a precision positioning stage that incorporates an optical linear encoder, allowing for closed-loop control with a resolution of '1nm' based on the reading values of the built-in scale. The stroke is '50mm', enabling both movement and precise positioning with a single unit. When used in combination with the feedback stage controller 'FC-911', it can operate at a movement speed of 5mm/sec.

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1nm Feedback Stage FS-1050SPX(MD)/XY

1nm Feedback Stage FS-1050SPX(MD)/XY

"Precision positioning device" with 1nm high resolution, high positioning reproducibility, and excellent position retention after positioning!

This is a high-resolution positioning stage with an optical linear scale built into the center of the stage, which reduces detection errors. It has a stroke of 50mm with a resolution of 1nm (*1). Thanks to our in-house developed linear scale and unique feedback control circuit, it offers high resolution, excellent positioning repeatability, and position holding capability after positioning. The high torque type is FS-1050SPX (MD) and the high-speed type is FS-1050UPX. (*1) In combination with the feedback stage controller FC-911.

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Submicron Feedback Stage FS-1020X/XY

Submicron Feedback Stage FS-1020X/XY

Built-in encoder high-resolution and long-stroke positioning stage

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to reduce detection errors. It has a stroke of 20mm with a resolution of either 50nm or 100nm (*1). Thanks to our in-house developed linear encoder and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controllers FC-111 or FC-411.

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Submicron Feedback Stage FS-1040X/XY

Submicron Feedback Stage FS-1040X/XY

Built-in encoder high-resolution positioning stage with high positioning repeatability and excellent position holding after positioning!

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to minimize detection errors. By reading the position with a self-developed encoder and performing feedback control, it excels in resolution, positioning repeatability, and position holding capability. When combined with the feedback stage controller FC-411, it operates with a resolution of '50nm'. When combined with the FC-111, it operates with a resolution of '100nm'. The stroke is '40mm'.

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Submicron Feedback Stage FS-1050X/XY

Submicron Feedback Stage FS-1050X/XY

"Precision positioning device" with high resolution, high positioning reproducibility, and excellent position retention after positioning!

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage to reduce detection errors. It has a stroke of 50mm with a resolution of either 50nm or 100nm (*1). Thanks to our in-house developed linear encoder and proprietary feedback control circuit, it offers high resolution, excellent positioning repeatability, and position retention after positioning. (*1) In combination with the feedback stage controllers FC-411 or FC-111.

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Submicron Feedback Stage FS-1100X/XY

Submicron Feedback Stage FS-1100X/XY

100mm stroke long-stroke and high-resolution positioning stage

This is a high-resolution positioning stage with an optical linear encoder built into the center of the stage, reducing detection errors. Since the position is detected by the encoder and feedback control is performed, it excels in resolution, position reproducibility, and position holding capability. When combined with the feedback stage controller FC-411, it operates with a resolution of '50nm', and when combined with FC-111, it operates with a resolution of '100nm', with a stroke range of '100mm'.

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Micro Rotation Feedback Stage FS-1120θ

Micro Rotation Feedback Stage FS-1120θ

"Precision positioning device" - A positioning stage for feedback micro-rotation of '0.00005°' or '0.0001°'!

This is a positioning stage for minute rotations with a stroke of '±4°' that incorporates an optical encoder. It allows for feedback control with a minimum step increment of '0.00005°' (*1) or '0.0001°' (*2). Thanks to our proprietary feedback control circuit, it features high resolution, excellent positioning repeatability, and position retention after positioning. (*1) Combination with feedback stage controller FC-401 (*2) Combination with feedback stage controller FC-101

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